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ATM System
EFEM & Process
Standard Robot
VTM System
300mm Loadlock & Vacuum Transfer Module (VTM)
Scan Robot for 300mm Ion Implanter
300mm Vacuum Robot
Healthcare
Smart Care Bed
Bio Automation
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Q/A
ENG
VTM System
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VTM System
NINEBELL
300mm Loadlock & Vacuum Transfer Module (VTM)
Scan Robot for 300mm Ion Implanter
300mm Vacuum Robot
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TEL
031-707-9362
FAX
031-705-9365
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300mm Vacuum Robot
PRODUCTS
NINEBELL
300mm Vacuum Robot
• Àû¿ëºÐ¾ß
1. 300mm Ion Implanter
2. Vacuum Robot for High Vacuum Process
• ´ëǥƯ¡
1. Ninebell¡¯s Own Design for High Reliability using Dual DD Motors
2. Reliable Motion Repeatability ¡æ Wafer Position Repeatability Error < ¡¾ 50§
3. High Speed Robot
¡æ Takt Time of each Motion for GET or PUT £¼ 2 sec.
4. Supply to Major Implanter Company
ȸ»ç¼Ò°³
Àλ縻
ȸ»ç°³¿ä
ȸ»ç¿¬Çõ
ÀÎÁõ¼ ¹× ¼ö»ó
¿À½Ã´Â±æ
ATM System
EFEM & Process
Standard Robot
VTM System
300mm Loadlock & Vacuum Transfer Module (VTM)
Scan Robot for 300mm Ion Implanter
300mm Vacuum Robot
Healthcare
Smart Bed
Bio Automation
°í°´Áö¿ø
°øÁö»çÇ×
Q/A
ȸ»ç¼Ò°³
ATM System
VTM System
Healthcare
°í°´Áö¿ø
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ÀüÈ : 031-707-9362
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Æѽº : 031-705-9365
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»ç¾÷ÀÚµî·Ï¹øÈ£ : 123-81-44708
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