VTM System

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VTM System NINEBELL
300mm Loadlock & Vacuum Transfer Module (VTM) Scan Robot for 300mm Ion Implanter 300mm Vacuum Robot
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TEL031-707-9362
FAX031-705-9365

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  • 300mm Loadlock & Vacuum Transfer Module (VTM)PRODUCTS
  • NINEBELL

300mm Vacuum Robot

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  • 1. 300mm Ion Implanter
  • 2. Vacuum Robot for High Vacuum Process
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  • 1. Ninebell¡¯s Own Design for High Reliability using Dual DD Motors
  • 2. Reliable Motion Repeatability ¡æ Wafer Position Repeatability Error < ¡¾ 50§­
  • 3. High Speed Robot ¡æ Takt Time of each Motion for GET or PUT £¼ 2 sec.
  • 4. Supply to Major Implanter Company
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|ÀüÈ­ : 031-707-9362
|Æѽº : 031-705-9365
|»ç¾÷ÀÚµî·Ï¹øÈ£ : 123-81-44708
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