VTM System

²Þ°ú °¡Ä¡¸¦ ½ÇÇöÇÏ´Â ±Û·Î¹ú ±â¾÷ (ÁÖ)³ªÀκ§

VTM System NINEBELL
300mm Loadlock & Vacuum Transfer Module (VTM) Scan Robot for 300mm Ion Implanter 300mm Vacuum Robot
°í°´¼¾ÅÍ
TEL031-707-9362
FAX031-705-9365

- ¿ù ~ ±Ý : ¿ÀÀü9½Ã ~ ¿ÀÈÄ6½Ã
- Åä, ÀÏ, °øÈÞÀÏ : ÈÞ¹«
  • 300mm Vacuum RobotPRODUCTS
  • NINEBELL

300mm Vacuum Robot

• Àû¿ëºÐ¾ß
  • 1. 300mm Ion Implanter
  • 2. Vacuum Robot for High Vacuum Process
• ´ëǥƯ¡
  • 1. Ninebell¡¯s Own Design for High Reliability using Dual DD Motors
  • 2. Reliable Motion Repeatability ¡æ Wafer Position Repeatability Error < ¡¾ 50§­
  • 3. High Speed Robot
    ¡æ Takt Time of each Motion for GET or PUT £¼ 2 sec.
  • 4. Supply to Major Implanter Company
°æ±â ¼º³²½Ã Áß¿ø±¸ »ç±â¸·°ñ·Î 99 ¼¾Æ®·²ºñÁö 2Â÷ Bµ¿ 615È£ (ÁÖ)³ªÀκ§
|ÀüÈ­ : 031-707-9362
|Æѽº : 031-705-9365
|»ç¾÷ÀÚµî·Ï¹øÈ£ : 123-81-44708
|´ëÇ¥ : ÃÖ¹®¼ö
|°³ÀÎÁ¤º¸°ü¸®Ã¥ÀÓÀÚ : ÃÖ¹®¼ö
|°³ÀÎÁ¤º¸Ã³¸®¹æħ
(C) NINEBELL. All Rights Reserved.