VTM System

꿈과 가치를 실현하는 글로벌 기업 (주)나인벨

VTM System NINEBELL

300mm Loadlock & Vacuum Transfer Module (VTM) Scan Robot for 300mm Ion Implanter 300mm Vacuum Robot

고객센터

TEL031-707-9362

FAX031-705-9365

- 월 ~ 금 : 오전9시 ~ 오후6시
- 토, 일, 공휴일 : 휴무

1. Ninebell’s Own Unique Design
2. Horizontal Scalar Motion Scan
3. High Angle ISO-Centric Scan
→ 0˚~55˚ Tilt ISO-Centric Scan Capability
→ Good Unif. at High Tilt Angle Ion Implantation even at Low Energy
4. Precise Scan Angle Control → Scan Angle Variation < ±0.15˚
5. Supply to Major Implanter Company